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Experimental evidence of strain relaxed domain structure in (100)/(001)-oriented epitaxial lead titanate thick films grown by metal organic chemical vapor deposition

机译:金属有机化学气相沉积法制备的(100)/(001)取向外延钛酸铅厚膜中应变松弛畴结构的实验证据

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摘要

Epitaxial (100)/(001)-oriented PbTiO3 films with thickness of 2.8 μm were grown on Nb-doped (100) SrTiO3 substrates by pulsed metal organic chemical vapor deposition. Complex domain structures consisting of c-domains (c1) and three types of a-domains (a1, a2, and a3) were observed by piezoresponse force microscopy in conjunction with high-resolution x-ray diffraction analysis. The obtained results suggest that (a2/a3) and (a1/c1) domain configurations represent mostly strain-relaxed structures. This conclusion is in good agreement with theoretical predictions made for thick films [Phys. State., Solidi 37, 329 (1976)].
机译:通过脉冲金属有机化学气相沉积法在Nb掺杂(100)SrTiO3衬底上生长了厚度为2.8μm的外延(100)/(001)取向的PbTiO3薄膜。压电响应力显微镜结合高分辨率x射线衍射分析观察到由c域(c1)和三种类型的a域(a1,a2和a3)组成的复杂域结构。获得的结果表明(a2 / a3)和(a1 / c1)域配置代表了大多数应变松弛结构。该结论与对厚膜的理论预测非常吻合。 State。,Solidi 37,329(1976)]。

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